Kiel 2004 – scientific programme

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P: Plasmaphysik

P 10: Postersitzung: Niedertemperaturplasmen Plasmatechnologie II, Staubige Plasmen II, Magnetischer Einschluss II

P 10.13: Poster

Tuesday, March 9, 2004, 17:45–19:30, Foyer

Characterisation of polymer films deposited by a DBD in Ar/fluorocarbon mixtures — •Igor Vinogradov and Achim Lunk — Institut fuer Plasmaforschung, Universitaet Stuttgart, Pfaffenwaldring 31, 70569 Stuttgart, Germany

Deposition of polymer films in a dielectric barrier discharges (DBD) at atmospheric pressure have been studied. Surface tension measurement, FTIR absorption spectroscopy, SEM and XPS methods were applied to get information on atomic content and surface topology of polymer films depending on fluorocarbon type and its concentration. The following fluorocarbon molecules have been studied: CF4, C2F6, C3HF7, and c-C4F8. From XPS spectra was found that polymer films can be deposited if the ratio F/C of primary fluorocarbon molecule is smaller than/or close to 3. FTIR absorption spectroscopy of the films on Si wafer indicates that the main absorption belongs to CF2-groups (1220 cm-1). In addition, absorption peaks which belong to amorphous PTFE (723-741 cm-1), CF3-groups (980 - 986 cm-1 and 1285 cm-1) and CF-groups (1090 cm-1 and 1340 cm-1) are also observed in the spectra. FTIR absorption spectra and XPS both together show that cross linking effect during plasma polymerisation process increases with increasing H atom content in fluorocarbon molecule.