Kiel 2004 – scientific programme
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P: Plasmaphysik
P 15: Diagnostische Methoden IV
P 15.3: Fachvortrag
Wednesday, March 10, 2004, 16:05–16:25, H\"orsaal D
Frequency effects in capacitively coupled hydrogen plasmas - a numerical approach — •Aurel Salabas and Ralf Peter Brinkmann — Lehrstuhl für Theoretische Elektrotechnik, Ruhr Universität Bochum, Universitätsstrasse 150, 44780 Bochum
Capacitively coupled plasma (CCP) discharges sustained in pure H2 have been investigated using a self-consistent, two-dimensional fluid model.
The model describes the charged-particle transport in CCP solving the transport equations (the zero-, first- and second-order moments of Boltzmann equation for the electrons and the zero- and first moments for the ions) coupled with Poisson’s equation.
The calculations cover a large domain of frequencies (13.56 MHz), pressures (0.2-8.0 Torr), rf applied voltages (150-450 V) and geometric dimensions (1.6-12.8 cm radii and 1.6-6.4 cm interelectrode distances).
The study presents the effect of frequency variation on the space-time behavior of different plasma parameters (charged particle densities, electron mean energy, electric field distribution, ionization and dissociation rates).