Kiel 2004 – wissenschaftliches Programm

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P: Plasmaphysik

P 17: Postersitzung: Plasma-Wand-Wechselwirkung III, Grundlegende Probleme Theorie II, Schwerionen- Laserplasmen II, Dichte Plasmen II

P 17.12: Poster

Mittwoch, 10. März 2004, 17:45–19:30, Foyer

A Self-consistent Model for a Nonlinearly Modulated Plasma Boundary Sheath: Fourier Analysis and Implementation of Newton’s Method — •Mustafa Bayrak und Ralf Peter Brinkmann —
Lehrstuhl für Theoretische Elektrotechnik, Ruhr Universität Bochum, Universitätsstrasse 150, 44780 Bochum

In the last years, in-situ diagnostic methods were successfully introduced into the control of industrial plasma processes. In microelectronics, these methods are known as AEC/APC, for advanced equipment control/advanced process control. Self-excited electron resonance spectroscopy (SEERS) is a particularly successful such methods, owing to its robustness and the fact that is strictly passive and contamination free.

SEERS operates by observing the self-excitation of the so-called series resonance that occurs in bounded plasmas. The mechanism of this resonance involves a periodic exchange of energy between the electrostatic field of the plasma boundary sheath and the kinetic motion of the electrons in the bulk. A deeper understanding of the SEERS method requires a detailed analysis of the mechanisms which excite this oscillation, in particular the nonlinearities of the sheath. In this work, we present a self-consistent model of a nonlinearly modulated plasma boundary sheath. The non-linear dependence of the fourier coefficients of the current density through the sheath and the voltage across the sheath are related and their mutual dependence is characterized.