Kiel 2004 – scientific programme

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P: Plasmaphysik

P 3: Postersitzung: Niedertemperaturplasmen Plasmatechnologie I, Diagnostische Methoden I

P 3.29: Poster

Monday, March 8, 2004, 17:45–19:30, Foyer

Analytical Model for an ICP Discharge in Hydrogen — •V.A. Kadetov and U. Czarnetzki — Institute for Plasma and Atomic Physics, Faculty for Physics and Astronomy, Ruhr-University Bochum, 44780 Bochum

A simple model for a low pressure ICP discharge at 13.56 MHz in hydrogen is presented. Although the model is simple enough to allow a full analytical calculation, it still describes the relevant discharge physics reasonably well to show good agreement with measurement over a wide range of parameters. Small deviations can easily be related to and explained by simplifying assumptions made in the model. The model has three modules for the discharge physics, the electrical coupling with the RF antenna and the sheath in front of grounded walls. Residual capacitive coupling in the ICP mode is included in the model. The most important assumptions are Maxwellian electron energy distribution and homogeneous electron temperature. While the former assumption was confirmed by measurement, the latter is not exactly correct and results in some small deviations. Input parameters are the neutral gas pressure and temperature and the power from the RF generator. Further, the geometry of the antenna and the discharge chamber and the resistance of the RF antenna and the matching unit are required. We calculate the electron temperature, the plasma density (spatially resolved), electric fields and potentials in the sheath (temporally resolved), the ion energy distribution function and the transition between ICP and CCP mode.