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DF: Dielektrische Festkörper
DF 5: Poster
DF 5.4: Poster
Mittwoch, 10. März 2004, 14:30–18:00, Poster C
Integrated electromagnetic bandgap structures for micro- and millimeter waves — •Michael Schuster and Norbert Klein — Forschungszentrum Jülich, 52428 Jülich
2dimensional EBG structures are most promising for a possible application as integrated structure for microwave and optoelectronical devices due to their advantages in terms of stability, EBG properties and applicable machining processes. Combining microwave range sized models, full electromagnetic field simulation software and silicon micromachining processes it is feasible to built up an integrated circuit technology based on EBG materials for frequencies from several 10 GHz up to the millimeter wave range of several 100 GHz.
Starting from the investigation of modular structures for frequencies as low as 10 GHz, we have been investigating the fabrication of EBG structures for frequencies around 30 GHz employing a lost Mould technique. We are investigating line and point defect structures in these 2 dimensional EBG lattices, Q factors of excited modes and the optimisation of impedance matching between integrated EBG structures and conventional external waveguiding devices.
For even higher frequencies around 100GHz and the lower Terahertz regime, we are investigating the fabrication and the properties of high resistive silicon 2D EBG structures fabricated by a chemically assisted silicon etching process by frequency and time domain mmeasurements.