Regensburg 2004 – wissenschaftliches Programm

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DF: Dielektrische Festkörper

DF 6: Nanostrukturen, Schichten und Keramiken

DF 6.3: Vortrag

Donnerstag, 11. März 2004, 10:50–11:10, H11

Electrical fatigue of PZT ferroelectric films: in-situ structural investigations — •J.L. Cao¹, U. Klemradt¹, A. Solbach¹, U. Böttger², U. Ellerkmann², P. Gerber², P. J. Schorn², and R. Waser² — ¹II. Physikalisches Inst., RWTH Aachen, Germany — ²Institut für Werkstoffe der Elektrotechnik 2, RWTH Aachen, Germany

Synchrotron radiation from Hasylab was used to study the structural evolution of thin ferroelectric Pb(Zr_0.3Ti_0.7)O₃ (PZT) films under the influence of an external AC field. In order to be sensitive to the evolution of structural disorder or transitional layers at the electrode/PZT interfaces, grazing incidence x-ray reflectivity was used instead of conventional diffraction. Reflectivity curves were measured under in-situ conditions for up to 108 electrical cycles, corresponding to different fatigue states. The simulation of the reflectivity curves points at the growth of a very thin Pt/PZT interfacial transition layer that is possibly correlated with the electrical fatigue of the capacitor structure. The relationship between ferroelectric fatigue and structural features of PZT thin films is discussed with emphasis on the possibility of a mechanism which develops disorder at the interface and contributes to the observed electrical properties.