Regensburg 2004 – scientific programme

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DS: Dünne Schichten

DS 10: FV-internes Symposium „Analytische Elektronenmikroskopie an dünnen Schichten“

DS 10.3: Invited Talk

Tuesday, March 9, 2004, 10:50–11:30, HS 32

Electron Energy-loss Spectrometry in the Electron Microscope — •Ferdinand Hofer — Research Institute for Electron Microscopy, Graz University of Technology, Steyrergasse 17, A-8010 Graz

Electron energy-loss spectrometry (EELS), carried out in a transmission electron microscope (TEM), is now routinely used to measure chemical and structural properties of very small regions of a thin specimen. The power of this technique depends significantly on two parameters: its spatial resolution and the energy resolution available in the spectrum or in an energy-filtered TEM image. EELS constitutes a wide spectral band spectroscopy giving access to both collective phenomena in the low-loss spectral region and excitation of the inner-shell levels with high collection efficiency and high sensitivity for the light elements. In this lecture the basics of EELS will be explained such as quantitative elemental analysis and derivation of dielectric data from the low-loss region. This will be supplemented by examples from material science, physics and chemistry. Finally, new instrumental developments such as high energy resolution EELS in a monochromized TEM will be addressed.