Regensburg 2004 – scientific programme

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DS: Dünne Schichten

DS 10: FV-internes Symposium „Analytische Elektronenmikroskopie an dünnen Schichten“

DS 10.4: Invited Talk

Tuesday, March 9, 2004, 11:30–12:10, HS 32

Energy-filtering transmission electron microscopy in materials science — •Wilfried Sigle — Max-Planck-Institut für Metallforschung, Heisenbergstraße 3, 70569 Stuttgart

Electron energy filters have become a standard equipment of modern transmission electron microscopes. Such filters enable the microscopist to select electrons which have undergone specific energy losses during their path through the specimen. The final image is formed only from the selected electrons. The main advantage of this technique is to obtain chemical information from relatively large specimen areas with a spatial resolution close to or even below 1 nm.

In this lecture the different methods of energy-filtering TEM will be explained such as zero-loss filtering, the three-window technique and the acquisition of energy-filtered series. This will be supplemented by examples from materials science, demonstrating the kind of chemical and physical information which can be extracted from energy-filtered images. Finally, new developments in the design of electron energy filters will be addressed.

For further information see: Ludwig Reimer: Energy-Filtering Transmission Electron Microscopy (Springer Series in Optical Sciences 71, Springer, Berlin, Heidelberg, 1995).