Regensburg 2004 – wissenschaftliches Programm
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DS: Dünne Schichten
DS 14: Schichtwachstum
DS 14.6: Vortrag
Mittwoch, 10. März 2004, 15:45–16:00, HS 32
Control of surface roughness in amorphous thin film growth — •Frank Elsholz1, Eckehard Schöll1, Hans Eichler2, Chris Scharfenorth2, and Arkadi Rosenfeld3 — 1Institut für Theoretische Physik, Technische Universität Berlin, Hardenbergstrasse 36, D–10623 Berlin — 2Optisches Institut, Technische Universität Berlin, Hardenbergstrasse 36, D–10623 Berlin — 3Max-Born-Institut, Max-Born-Str. 2a, 12489 Berlin
The growth of optical layers of SiO2 and Nb2O5 on amorphous substrates is investigated. We develop a kinetic Monte-Carlo model which mimics the amorphous structure by randomly fluctuating binding energies. The resulting surface profiles are characterized by their root mean square roughness, height-height correlation functions, and growth exponents. For strong random fluctuations the growth exponents exceed the value 0.5, in good agreement with experiment.