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DS: Dünne Schichten

DS 15: Oberfl
ächenmodifizierung

DS 15.6: Vortrag

Mittwoch, 10. März 2004, 17:30–17:45, HS 32

Influence of gas pressure and substrate temperature on diffusion process of carbon/nitrogen in 304 AISI using PIII — •A. M. Abd El-Rahmann^1,2, F. M. El-Hossary¹, N. Z. Negm¹, F. Prokert², E. Richter², and W. Möller² — ¹Physics Department, Faculty of Science, South Valley University, Sohag Branch, Sohag, Egypt — ²Institute of Ion Beam Physics and Material Research, Centrum Rossendorf, Dresden, Germany

Plasma immersion ion implementation (PIII) has been used to modify the surface properties of 304 austenitic stainless steel (AISI). The influence of the working gas pressure in a range from 0.2 up to 1.0 Pa and the substrate temperature from 300 ^∘C to 500 ^∘C on the microstructure, nitrogen/carbon concentration depth profile and surface microheadness were investigated at fixed gas composition (25 % C₂H₂, 75 % N₂), 350 W rf plasma power and -30 kV negative biased potential. The experimental results show that the substrate temperature and the diffusion process of nitrogen and carbon is affected by the increase of gas pressure. The thickness of the modified layer is more than 30 µm. The results provide recent diffusion rate is about 3.4×10⁻¹ µm²/sec with a surface microhardness of about 1880 kg/mm².