Regensburg 2004 – wissenschaftliches Programm

Bereiche | Tage | Auswahl | Suche | Downloads | Hilfe

DS: Dünne Schichten

DS 21: Dünne Schichten für die Photovoltaik III

DS 21.2: Vortrag

Donnerstag, 11. März 2004, 16:00–16:15, HS 32

In-situ analysis of transparent conducting oxides — •Yvonne Gassenbauer, Frank Säuberlich, Robert Schafranek, and Andreas Klein — Darmstadt University of Technology, Institute of Materials Science, Surface Science Division

Transparent conducting oxides (TCO) as ZnO, SnO₂ and In₂O₃ are used in all thin film solar cells. Although they are mostly used in degenerately n-doped form as electrodes, undoped films are often inserted between the TCO and the semiconductor. Obviously the interfaces are important for device efficiency. To understand the interfaces of different TCOs we present our results on the electronic surface properties of different TCOs. The films were prepared by RF and DC magnetron sputtering in an ultrahigh vacuum deposition chamber, which was attached to the integrated surface analysis and preparation system DAISY-MAT (Darmstadt Integrated System for MATerials research). Film composition and surface Fermi level position in the band gap for un-doped and doped ZnO, SnO₂ and In₂O₃ will be presented and discussed.