Regensburg 2004 – scientific programme
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DS: Dünne Schichten
DS 22: Postersitzung
DS 22.32: Poster
Tuesday, March 9, 2004, 14:30–17:00, Poster B
New possibilities in nanoindentation — •Maksim Karniychuk1, Thomas Chudoba2, Norbert Schwarzer1, and Frank Richter1 — 1Chemnitz University of Technology, Institute of Physics, 09107 Chemnitz — 2ASMEC Advanced Surface Mechanics, Dresden
Nanoindentation with normal force is widely used for the investigation of mechanical properties of thin films. Using a lateral force in addition would allow investigating new properties.
We have developed a theoretical model of the mechanical contact of a spherical indenter and a coated substrate under both normal and lateral load. Together with a novel Lateral Force Unit (LFU) this will enable us to determine mechanical properties of thin films which were not accessible so far. The aim of the poster is to present these new possibilities:
1) Poisson’s ratio can be determined from the lateral displacement of the maximum deformation under normal and lateral load.
2) During loading with a lateral force, tensile stress is formed near the film surface which cause cracks. The relevant stress components can be determined.
3) Determination of yield stress of very thin films: Measuring the yield stress of very thin and hard films on less hard substrates is difficult since the substrate can be plastically deformed first. The lateral force provides possibilities to increase the stress in the film but to save the substrate.