Regensburg 2004 – scientific programme

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DS: Dünne Schichten

DS 22: Postersitzung

DS 22.38: Poster

Tuesday, March 9, 2004, 14:30–17:00, Poster B

Adjusting Wettability, Adhesion, and Residual Stress of Hard Carbon Coatings — •Nicolas Wöhrl, Stephan Reuter, Oleksiy Filipov, and Volker Buck — Thin Film Technology Group, Dept. of Physics, University of Duisburg-Essen, Universitätsstr. 3-5, 45141 Essen, Germany

In this work hard carbon coatings are grown with a dc-arc. As a carbon source, graphite electrodes are used and the films are deposited on double-side polished (100) Si-Substrate in a hydrogen atmosphere. The variation of process-parameters like gas flow, pressure, or gas-mixture is used to influence the properties of the films. Nitrogen, Argon and Tetramethyl-Silane is used as gas admixture. Properties like mechanical stress in the film, adhesion of the film on the substrate and wettability can be adjusted in a wide range. The adhesion of the films to the substrate is tested by cavitation erosion tests. The cavitation erosion test is a quantitative measurement system for adhesion, in which the ablation of the film as a function of measuring time is used to characterize the adhesion of the film. The advantage of this method compared to conventional adhesion tests (such as nanoindenter scratch tests) is the lack of wear of the test-equipment. The mechanical stress is analysed by an optical setup, measuring the substrate curvature. The films are also analysed by Fourier-transformed infrared spectroscopy (FTIR), micro-Raman measurements, and scanning electron microscopy (SEM).