Regensburg 2004 – scientific programme
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DS: Dünne Schichten
DS 6: Spezielle Schichten II
DS 6.5: Talk
Monday, March 8, 2004, 11:15–11:30, HS 32
Modeling thin films of SiO(2), ZrO(2) and HfO(2) with various densities as effective optical medium. — •Dieter Mergel1, Martin Jerman2, and Qiao Zhaohui1 — 1Universität Duisburg-Essen, Campus Essen, Fb-7 Physik — 2Universität Duisburg-Essen, Campus Essen, Optische Werkstatt und Fb-7
Amorphous films of SiO(2), ZrO(2) and HfO(2) with various packing densities and thicknesses between 150 to 1500 nm were prepared by electron beam evaporation. The density of the films decreases with increasing background pressure similar to the case of TiO(2) [1]. The functional dependence of the refractive index on the density was modeled on the basis of the Bruggeman effective medium approach [2]. For the SiO(2) series, the results were compared with the general refractivity formula obtained from experiments with densified silicate glass [3]. A best fit of the model to the experimental series is obtained when it is assumed that the bulk amorphous grains of SiO(2) films are quartz-like (i.e. similar density and refractive index). A similar, but less detailed theoretical investigation of the (rho, n) results or ZrO(2) suggests baddeleyite-like amorphous grains. [1]Mergel D, Buschendorf D, Eggert S, Grammes R, Samset B, Thin Solid Films 371 (2000) 218 - 24 [2]Mergel D, Thin Solid Films 397 (201) 216-22 [3]Arndt J, Hummel W, Phys. Chem. Minerals 15 (1988) 363-9