Regensburg 2004 – wissenschaftliches Programm

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HL: Halbleiterphysik

HL 12: Poster I

HL 12.54: Poster

Montag, 8. März 2004, 16:30–19:00, Poster A

Controlled growth of zinc oxide nano-pillars with a vapor-solid-liquid process — •Anton Reiser, Andreas Ladenburger, Xinmin Cao, Uwe Röder, Rolf Sauer, and Klaus Thonke — Abt. Halbleiterphysik, Universität Ulm, D-89069 Ulm

We have produced ordered zinc oxide nano-pillars using a vapor-liquid-solid process [1]. A-plane sapphire substrates were covered with regularly arranged gold particles in different ways via self-organizing processes. The gold particles act as catalysts in the high temperature growth of the zinc oxide pillars. Depending on the process parameters we generated pillars with diameters from 30 nm to 2 µm and heights from 500 nm to several micrometers. The created nano-structures were investigated by scanning electron microscopy, X-ray diffraction and photoluminescence spectroscopy revealing excellent crystalline material quality.

[1] M. H. Huang et al, Science 292 (2001), 1897