Regensburg 2004 – scientific programme

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HL: Halbleiterphysik

HL 40: SiC I

HL 40.2: Talk

Thursday, March 11, 2004, 15:30–15:45, H15

Micro-electromechanical systems based on 3C-SiC/Si heterostructures — •Christian Förster, Volker Cimalla, Michael Fischer, Klemens Brückner, Matthias Hein, Jörg Pezoldt, and Oliver Ambacher — FG Nanotechnologie und FG Hochfrequenztechnik, Zentrum für Mikro- und Nanotechnologien, TU Ilmenau, PF100565, 98693 Ilmenau

Wide bandgap semiconductors like SiC are excellent materials for high temperature, high frequency and high power applications. Furthermore the properties of SiC are typical for materials suitable for modern applications in micro-sensors, micro-actuators as well as in micro- and nano-electromechanical systems (MEMS, NEMS). Novel applications of SiC/Si based MEMS and NEMS are dosing and sensor systems for micro- and nano-fluidic systems, e.g. for fast and reliable biomedical testing and analysis. We have developed a technology for processing SiC/Si-based MEMS and NEMS. A micro dosing head for pulmonary amount of liquid in very small area are realized. This dosing head consist of parallel operating multi micro pipes running at a defined pressure. Furthermore, we used 3C-SiC/Si heterostructures to process resonator bars having geometries in the sub micro meter range. These bars open the possibility to evaluate the viscosity of water based nano-droplets or to measure the mass of particles, for example proteins, positioned on the bars.