Regensburg 2004 – wissenschaftliches Programm

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HL: Halbleiterphysik

HL 46: Hauptvortrag Hoenlein

HL 46.1: Hauptvortrag

Freitag, 12. März 2004, 10:15–11:00, H15

Carbon Nanotubes - A Successor to Silicon Technology? — •Wolfgang Hoenlein, Franz Kreupl, Georg Duesberg, Andrew Graham, Maik Liebau, Werner Pamler, Robert Seidel, and Eugen Unger — Infineon Technologies AG, Corporate Research, Otto-Hahn-Ring 6, D-81739 Muenchen

Carbon nanotubes (CNTs) are powerful candidates for both interconnects and field-effect transistors with better performances than silicon based devices. The CNTs can be selectively produced in microelectronics compatible processes using catalyst mediated CVD growth. One promising concept for the integration of CNT’s into the existing silicon technology is the replacement of metal wires at places of critical current density. The recent results from CNT field-effect transistor devices will be reviewed and compared with state-of-the-art silicon devices. Further, ideal and non-ideal CNT transistors have been simulated and their properties compared with the expectations for the 2016 silicon transistor. Based on this, a concept for a 3-dimensional CNT based technology will be presented. We will also identify the key success factors of the silicon technology and assess the emerging CNT technology with respect to the mature silicon technology.