Regensburg 2004 – wissenschaftliches Programm

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MA: Magnetismus

MA 13: Poster:Schichten(1-23),Spinabh.Trsp(24-41),Exch.Bias(42-56),Spindyn.(57-67),Mikromag.(68-76),Partikel(77-90),Spinelektr.(91-97),Elektr.Theo.(98-99),Mikromag+PhasÜ+Aniso.(100-105),Magn.Mat.(106-118),Messmethod.(119-121),Obflm.+Abbverf.(122-123)

MA 13.17: Poster

Dienstag, 9. März 2004, 15:00–19:00, Bereich A

Influence of substrates on hard magnetic Nd-Fe-B films — •Ah-Ram Kwon, Ullrich Hannemann, Sebastian Fähler, Volker Neu, Bernhard Holzapfel, and Ludwig Schultz — IFW Dresden, Helmholzstr. 20, 01069 Dresden and SFB 463

Nd₂Fe₁₄B has excellent intrinsic properties such as high anisotropy and high saturation magnetization. This material is already used in high performance bulk magnets. Thin films are interesting for application in microelectromechanical systems. In both cases, high remanence is required which can be achieved in the film by textured growth. This can be controlled by suitable choice of buffer and substrate materials as well as deposition conditions.

Nd-Fe-B films were prepared by pulsed laser deposition on Ta or Ir buffer layers using Al₂O₃(0001), MgO(100) or amorphous SiN substrates. They possess an out-of-plane c-axis texture and therefore show a high remanence to saturation magnetization ratio around 0.95. The films exhibit coercivities between 1.3 T and 2.0 T when measured perpendicular to the film plane, i.e. parallel to the c-axis (easy magnetization axis). We compare results of phase formation, microstructure and magnetic properties of hard magnetic Nd-Fe-B films deposited on different buffers and substrates.