Regensburg 2004 – wissenschaftliches Programm

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MA: Magnetismus

MA 13: Poster:Schichten(1-23),Spinabh.Trsp(24-41),Exch.Bias(42-56),Spindyn.(57-67),Mikromag.(68-76),Partikel(77-90),Spinelektr.(91-97),Elektr.Theo.(98-99),Mikromag+PhasÜ+Aniso.(100-105),Magn.Mat.(106-118),Messmethod.(119-121),Obflm.+Abbverf.(122-123)

MA 13.32: Poster

Dienstag, 9. März 2004, 15:00–19:00, Bereich A

Characterization and optimization of Co/Al₂O₃/Co/CoO magnetic tunnelling junctions — •Erik Verduijn and Kurt Westerholt — Institut für Experimentalphysik/Festkörperphysik, Ruhr-Universität Bochum, 44780 Bochum

Co/Al₂O₃/Co magnetic tunnel junctions (MTJs) are well established in literature and ideally suited as a reference system for the development and optimization of the techniques relative for the design and fabrication of microstructured tunnel junctions. To this end we have performed magnetotransport and SQUID magnetometry measurements on Co/Al₂O₃/Co/CoO MTJs and atomic force microscopy studies of Co/Al₂O₃/Co/CoO layers fabricated under a variety of different growth conditions in order to optimize several critical MTJ parameters, in particular the optimization of the tunnel barrier oxidation parameters, roughness of the bottom ferromagnetic electrode and the magnetic switching behaviour of the ferromagnetic electrodes. Furthermore we report on the microlithographic technique based on ion beam etching and electron beam lithography we use for the fabrication of micrometer scale MTJs.