Regensburg 2004 – wissenschaftliches Programm
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TT: Tiefe Temperaturen
TT 13: Messger
äte, Kryotechnik
TT 13.7: Vortrag
Dienstag, 9. März 2004, 17:45–18:00, H20
EDS with Microcalorimeters — •Christian Hollerith1, M. Bühler2, F. von Feilitzsch1, J. Höhne2, M. Huber1, J. Jochum1, K. Phelan2, B. Simmnacher3, R. Weiland3 und D. Wernicke1 — 1Physikdepartment der TU München, E15, 85748 Garching — 2Vericold technologies GmbH, 85737 Ismaning — 3Infineon technologies AG, 81739 München Perlach
Energy dispersive X-ray spectroscopy (EDS) of samples mounted in scanning electron microscopes (SEM) is a standard technique for elemental material analysis. Today Si(Li)-detectors are used in this field with a maximum energy resolution of about 130eV at a X-ray energy of 6keV. This energy resolution is unsatisfactory for the separation of the low energetic lines like M-lines of heavy elements, L-lines of medium heavy elements and K-lines of light elements. But for excitation of small volumes like particles in samples with the electron beam in the SEM only low acceleration voltages may be used and therefore only low energetic lines are excited. A high resolution spectrometer with a microcalorimeter detector cooled by a pulse tube refrigerator with an ADR unit has been installed on a SEM for this purpose. It shows an average energy resolution of better than 10eV at 1.5keV. The low countrate in comparison to Si(Li) detectors due to the small area of the microcalorimeter has been increased by the application of a polycapillary X-ray optics. This way the microcalorimeter is a promising tool for material analysis of thin layers and small samples.