Berlin 2005 – wissenschaftliches Programm
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DF: Dielektrische Festkörper
DF 5: Dielektrische und ferroelektrische dünne Schichten und Nanostrukturen I
DF 5.4: Vortrag
Montag, 7. März 2005, 11:20–11:40, TU TC6
Characterization of laterally confined ferroelectric nanostructures — •Andreas Rüdiger1, Andreas Rüdiger1, Frank Peter1, Sven Clemens2, Kristof Szot1, Theo Schneller2, Stephan Tiedke3, Rainer Waser1, Frank Peter1, Sven Clemens2, Kristof Szot1, Theo Schneller2, and Stephan Tiedke3 — 1cni-center of nanoelectronic systems for information technology, FZ Jülich, 52425 Jülich — 2Institut für Werkstoffe der Elektrotechnik II, RWTH Aachen, 52074 Aachen — 3Aixacct-Systems GmbH, Dennewartstr. 25-27, 52068 Aachen
Ferroelectricity is a cooperative phenomenon of coupled electric dipoles in a crystal lattice. For only a few nanometers lateral extension, Landau theory predicts the disappearance of macroscopic polarization. As we now experimentally approach this regime, quantitative measurements become imperative to determine the phase change behavior at this critical size. As it turns out, the ultimate limit of ferroelectricity is to a large extent governed by extrinsic effects such as lattice mismatch with the substrate, local stoichiometry, and surface contaminations. We discuss a new fabrication method, recent measurements and ways to make use of some side-effects. Direct electrical characterization and piezoelectric force microscopy of individual structures as well as a careful integration over numerous structures are presented.