Berlin 2005 – wissenschaftliches Programm

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DF: Dielektrische Festkörper

DF 6: Dielektrische und ferroelektrische dünne Schichten und Nanostrukturen II

DF 6.4: Vortrag

Montag, 7. März 2005, 15:00–15:20, TU TC6

Self-assembled SrZrO₃ nanostructures epitaxially grown on SrRuO₃ — •Regina Dittmann, Enrique Vasco, Silvia Karthäuser, Jiaqing He, Chunlin Jia, and Rainer Waser — Institut für Festkörperforschung and Center of Nanoelectronic Systems for Information Technology, Forschungszentrum Jülich, 52425 Jülich

We investigated the possibility to grow self-assembled nanostructures of Cr-doped SrZrO₃ (SZO), which is a promising candidate for resistive switching non-volatile memories, by pulsed laser deposition. AFM-measurements with a conducting tip allow to identify SZO during its first growth stages on basis of the difference between the electrical conductivities of SZO and the SrRuO₃ (SRO) template layer. We are able to fabricate strain-induced SZO nanodots on SRO films grown on vicinal SrTiO₃ in a step flow growth mode. In a second approach, we used a nanopatterned SRO ripple pattern as template, which is created by self-organization in a step-flow inhibited regime employing surface modified SrTiO₃ substrates [1]. In that case, we observe the formation of regular dielectric SZO nanowires separated by deep and narrow boundaries that extend up to the conductive buffer layer. The switching properties of SZO nanodots and nanowires are investigated by AFM with a conducting tip.

[1] E. Vasco et. al, accepted for publication in Advanced Materials