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DS: Dünne Schichten

DS 12: Ionen-Festkörper-Wechselwirkung II

DS 12.4: Vortrag

Montag, 7. März 2005, 12:00–12:15, TU HS107

Self-organisation of thin NiO-films under swift heavy ion bombardment — •M. Kalafat¹, A. Feyh¹, W. Bolse¹, D. Etissa-Debissa¹, S. Klaumünzer², G. Schumacher², and G. Bilger³ — ¹Institut für Strahlenphysik, Stuttgart — ²Hahn-Meitner-Institut, Berlin — ³Institut für Physikalische Elektronik, Stuttgart

NiO films with thicknesses from 5 to 260nm on SiO₂ have been irradiated with swift heavy ion (Mev/amu) at 80K under different tilt angles (≥75^∘) with respect to the beam direction.
At low fluences the initially smooth and coherent NiO-layer was found to crack periodically and transform into a periodic lamellae structure with increasing fluence. The lamella (as the cracks) are oriented perpendicular to the projection of the beam direction onto the surface. They have a height of up to 2µm and a width down to 0,1µm. Their distances varied between 1 and 5µm. The characteristics of the lamellae structure depend on the irradiation conditions (ion, energy, fluence, angle, temperature). Multiple irradiation from different directions results in complex structures on a sub-µm scale. Post-irradiation of already existing structures under large angles and permanent rotation of the sample allows to homogeneously shrink their dimensions. This way we were able to generate an almost regular, large area covering arrangement of pillars of <200nm in diameter and some µm height.