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DS: Dünne Schichten

DS 14: Schichtherstellung mit Laserverfahren

DS 14.5: Vortrag

Montag, 7. März 2005, 16:15–16:30, TU HS107

Interface roughness of laser deposited Fe/MgO and FeCr/TiSc multilayers — •Andreas Meschede¹, Christian Fuhse², Thorsten Scharf¹, and Hans-Ulrich Krebs¹ — ¹Institut für Materialphysik, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen — ²Institut für Röntgenphysik, Universität Göttingen, Geiststraße 11, 37073 Göttingen

Multilayers with double layer periods in the nanometer range are of high technological interest for the use as x-ray optics in the wavelength regime in the "water window". Here Fe/MgO and FeCr/TiSc multilayers were deposited by pulsed laser deposition (PLD) in ultra high vacuum and in an inert gas atmosphere at room temperature. The interface roughness obtained by x-ray reflectometry is less than 0.5 nm and mainly depends on the bilayer thickness. It increases for ultrathin films, slightly depends on the number of bilayers and also depends on the kinetic energies of the deposited particles, which will be discussed.