Berlin 2005 – scientific programme
Parts | Days | Selection | Search | Downloads | Help
DS: Dünne Schichten
DS 19: Schichtabscheidung
Tuesday, March 8, 2005, 13:45–15:15, TU HS107
 |
13:45 | DS 19.1 | Invited Talk: In-situ-Charakterisierung der Schichtabscheidung mit gepulsten Magnetrons — •Thomas Welzel |
|
14:30 | DS 19.2 | The preparation of diamond / tungsten carbide composite films by microwave plasma assisted chemical vapour deposition (MWCVD) — •Hisham Abu Samra, Srikanth Vadali, Xin Jiang, and Hans-Joerg Deiseroth |
|
14:45 | DS 19.3 | Physics of the formation of polycrystalline silicon thin films by aluminum-induced layer exchange — •Jens Schneider, Juliane Klein, Andrey Sarikov, Martin Muske, Stefan Gall und Walther Fuhs |
|
15:00 | DS 19.4 | Investigation of a pulsed magnetron discharge by time-resolved diagnostics — •Thoralf Dunger, Thomas Welzel, Stephan Welzel und Frank Richter |