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DS: Dünne Schichten

DS 23: Postersitzung I

DS 23.13: Poster

Freitag, 4. März 2005, 16:00–18:30, Poster TU B

Deposition of diamond-like carbon coatings using DC-arc method — •Oleksiy Filipov, Nicolas Wöhrl, Stephan Reuter, and Volker Buck — Thin Film Technology Group, Dept. of Physics, University of Duisburg-Essen, Universitätsstr.3-5, 45141 Essen, Germany

Diamond-like carbon (DLC) coatings are still the subject of interest during the past decades due to their unique properties that can be varied in an unusually large area - e.g. from conducting to insulating or from hydrophilic to hydrophobic as well as gradually changed in hardness, residual stress, roughness, etc. - and these properties can be varied by choosing suitable coating parameters. The DLC coatings are deposited on different substrates using DC-arc deposition method. As a carbon source, graphite electrodes are used and the films are deposited on polished (100) Si and glass substrates in a vacuum and hydrogen atmosphere at pressure in range from 10 ⁻³ to 10 ⁻⁴ mbar. The variation in deposition parameters such as working pressure, substrate bias and gas mixture is used to influence the main film properties.The bias was applied to substrate in pulsed modes. The deposition parameters were in-situ monitored. After deposition films were investigated using different analytical techniques, including SEM, SSIOD, Raman Spectroscopy, UV-IR Spectroscopy. It was shown correlation between process parameters and mechanical, structural and optical properties of obtained DLC films.