Berlin 2005 – wissenschaftliches Programm
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DS: Dünne Schichten
DS 24: Postersitzung II
DS 24.18: Poster
Dienstag, 8. März 2005, 17:00–19:00, Poster TU B
Spectroscopic ellipsometry study of thin carbon films — •Pavel Tolstykh1, Sviatoslav Shokhovets2, and Gerhard Gobsch2 — 1BNTU Minsk, Skaryna Prosp. 65, 220027 Minsk, Belarus — 2Institute of Physics, TU Ilmenau, PF 100565, 98684 Ilmenau, Germany
Spectroscopic ellipsometry studies of thin carbon films deposited on silicon and quartz substrates by sputtering of a graphite target using a Nd-glass pulse laser were carried out. We observed a strong dependence of the dielectric function of the films on deposition regimes such as substrate temperature and laser pulse energy during deposition, as well as annealing temperature and duration. The experimental data were analysed using reference dielectric functions for graphite-like and diamond-like carbon films. The results obtained indicate that structural properties of the films depend on deposition and thermal treatment conditions. In particular, the content of graphite phase increases with increasing substrate temperature and laser pulse energy. Further we compare properties of laser deposited carbon films to plasma deposited ones doped with copper and discuss regimes to grow films suitable for various applications.