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Berlin 2005 – scientific programme

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DS: Dünne Schichten

DS 8: Ionen-Festkörper-Wechselwirkung I

DS 8.4: Talk

Saturday, March 5, 2005, 16:00–16:15, TU HS107

Effect of ion irradiation on Au nanoparticles deposited onto Si substrates — •Andreas Klimmer1, Masaki Ozawa2, Anitha Ethirajan1, Hans-Gerd Boyen1 und Paul Ziemann11Abt. Festkörperphysik, Universität Ulm — 2Zentrale Einheit Elektronenmikroskopie, Universität Ulm

Arrays of hexagonally arranged Au nanoparticles on top of Si substrates (∅ ≈ 10 nm, interparticle distances ≈ 80 nm) were sequentially irradiated with 200 keV Ar+ ions up to fluences of 1016 ions/cm2. The bombarded structures were analyzed by high-resolution SEM, AFM as well as cross-sectional TEM.

The Au nanoparticles seem to be stable up to a fluence of ∼ 1015 ions/cm2 (∼ 800 ion impacts on one nanoisland). Upon further irradiation the average particle height relative to the substrate level diminishes according to SEM and AFM. Subsequently, these techniques suggest an almost complete disappearance of the particles at fluences above 1016 ions/cm2.

However, TEM measurements reveal that the Au particles have not been just sputtered from the surface but complete particles can be re-detected within the Si substrate with their spherical shape conserved. This surprising effect might be due to bombardment induced changes in the visco-elastic properties of the underlying Si substrate. Whether for that process the substrate close to the nanoparticle has to be amorphized by the ion beam is not clear, yet.

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