Berlin 2005 – wissenschaftliches Programm
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HL: Halbleiterphysik
HL 17: Poster Ib
HL 17.14: Poster
Freitag, 4. März 2005, 16:30–19:00, Poster TU F
Guided growth of zinc oxide nano-pillars using self-organizing polymers for patterning the substrate with a catalyst — •Andre Langlois, Anton Reiser, Günther M. Prinz, Andreas Ladenburger, Martin Schirra, Rolf Sauer, and Klaus Thonke — Abteilung Halbleiterphysik, Universität Ulm, D-89069 Ulm
We have produced c-axis oriented zinc oxide nano-pillars via a vapor-liquid-solid process on a-plane sapphire substrates. The self-organizing properties of polymers are used to pattern the substrate surface with a catalyst to control the location of growth seeding. The dependence of the pillar thickness, height, and quality on the temporal growth temperature profile, source material, and oxygen supply during process is investigated. The catalyst pattern is analyzed by atomic force microscopy and high resolution scanning electron microscopy. The optical and crystalline properties of the asgrown nano-pillars are investigated by scanning electron microscopy, high resolution X-ray diffraction, photoluminescence spectroscopy, cathodoluminescence spectroscopy, and Raman spectroscopy.