Berlin 2005 – wissenschaftliches Programm

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HL: Halbleiterphysik

HL 17: Poster Ib

HL 17.43: Poster

Freitag, 4. März 2005, 16:30–19:00, Poster TU F

Fabrication of high-Q microdisks with embedded InAs quantum dots — •F. Wilde, T. Kipp, Ch. Heyn und D. Heitmann — Institut für Angewandte Physik und Zentrum für Mikrostrukturforschung, Universität Hamburg

Optical microdisks resonators have recently gained interest since their whispering gallery modes (WGMs) combine high Q-factors with small mode volumes [1] and thus giving the opportunity to study light confinement and light-matter interaction in various aspects. Especially a microdisk containing only one quantum dot which matches a WGM frequency and is spatially located in the antinode of the WGM would be of great interest [2].

We have fabricated large arrays of GaAs microdisks with embedded InAs quantum dots (QDs) using laser-interference lithography and a two-step etching process [3]. Our aim is to fabricate microdisks with decreasing densities of QDs so that eventually there is only one QD per microdisk. We report about the optimization of the preparation process in particular the etching which causes sidewall roughness and predominantly limits the Q-factor of a WGM. The samples are characterized by microphotoluminescence.

[1] B. Gayral et al., Appl. Phys. Lett. 75, 1908 (1999)

[2] P. Michler et al., Appl. Phys. Lett. 77, 184 (2000)

[3] K. Petter et al., Appl. Phys. Lett. 81, 592 (2002)