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HL: Halbleiterphysik

HL 55: Quantenpunkte und -dr
ähte: Herstellung und Charakterisierung II

HL 55.3: Vortrag

Dienstag, 8. März 2005, 15:30–15:45, TU P-N201

Optical investigation of nanoelectromechanical actuations — •Christine Meyer, Heribert Lorenz, and Khaled Karrai — Center for NanoScience and Physics Department, LMU München

Due to their small sizes and their even smaller actuation ranges nanoelectromechanical systems (NEMS) are not easy to characterize. Electron microscopy seems to be well suited for their investigation but the electrical interaction with the nanostructures can be highly destructive. Here, we present an all-optical method to non-destructively detect NEMS deflections and thus test the functionality of nanomechanical actuators.

The optical investigation was performed on silicon-based cantilevered nanobeams defined by electron-beam lithography. The free-standing cantilevers were either located 400 nm above a silicon substrate or the substrate right beneath the cantilevers was removed. Electrostatic actuation of the nanostructures was achieved by applying a voltage drop between two cantilevers.

Images of the NEMS were taken by confocal scanning optical microscopy while the cantilevers were electrostatically actuated under a low frequency voltage. By demodulation at the actuation frequency displacements of less than 0.5 nm were resolved.