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HL: Halbleiterphysik

HL 58: Poster IIb

HL 58.29: Poster

Dienstag, 8. März 2005, 16:30–19:00, Poster TU F

Realisation of a high efficiency gas sensing device — •Daniel Pergande¹, Torsten M. Geppert^1,2, Andreas von Rhein¹, Stefan L. Schweizer¹, Ralf B. Wehrspohn¹, Thomas Beyer³, Iliyana Hinkov³, and Armin Lambrecht³ — ¹Universität Paderborn, Dept. Physik, Warburger Str. 100, 33098 Paderborn, Germany — ²Max-Planck-Institut für Mikrostrukturphysik, Weinberg 2, 06120 Halle, Germany — ³Fraunhofer-Institut für Physikalische Messtechnik, Heidenhofstr. 8, 79110 Freiburg

We present the conception of a gas sensor as a application of a 2D photonic crystal (PC). The PC consists of a membrane made of electrochemical etched pores in Silicon. The gas measurement makes use of the light absorption of the gas. Due to the effect of low group velocities a stronger interaction of the light with the gas is achieved. So the detection distance required for a certain sensitivity can be drastically decreased. One obtains a significant minituarisation of the device. The PC has to be designed according to the absorption frequency of the gas(in this case alcohol). This occures by the variation of the diameter and the pitch of the pores. A novel taper concept will be introduced and the fabrication of the device will be described.