Berlin 2005 – wissenschaftliches Programm

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HL: Halbleiterphysik

HL 58: Poster IIb

HL 58.40: Poster

Dienstag, 8. März 2005, 16:30–19:00, Poster TU F

Photonic Crystal Waveguides Based On The Insulator-On-Silicon-On-Insulator Material System — •Cécile Jamois^1,2, Christian Hermann², Alexey Milenin¹, Torsten Geppert^1,3, Kosmas Tsakmakidis², Ralf Wehrspohn³, and Ortwin Hess² — ¹Max-Planck Institut für Mikrostrukturphysik, Weinberg 2, 06108 Halle (Saale) — ²Advanced Technology Institute, University of Surrey, Guildford, Surrey, GU2 4LE, UK — ³Department Physik, Nanophotonische Materialien, Universität Paderborn, Warburgerstr. 100, 33098 Paderborn

In this paper, we discuss the properties of planar photonic crystal (PPC) waveguides in the insulator-on-silicon-on-insulator (IOSOI) material system. IOSOI-based PPCs are very attractive, since they are compatible with the standard silicon technology and offer a high light confinement, due to the high vertical index contrast and to the vertical symmetry of the structure. Using FDTD simulations as well as a plane-wave method (MIT package) we study the properties of PPCs based on IOSOI and put into evidence intrinsic loss mechanisms associated with the planar nature of PPCs, which may restrict their application range. Next, we discuss the consequences of these loss mechanisms on the properties of waveguides made in IOSOI-based PPCs, and propose solutions to the possible restrictions on the device functionalities. The experimental fabrication of these waveguides is achieved by F-based ICP etching through a Cr mask, which is patterned by e-beam lithography and Cl-based RIE. Optical measurements on the fabricated structures are performed and compared to the theoretical predictions.