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HL: Halbleiterphysik

HL 58: Poster IIb

HL 58.54: Poster

Tuesday, March 8, 2005, 16:30–19:00, Poster TU F

Focused ion beam implantation of magnetic ions — •Alexander Melnikov, Safak Gök, Sinan Ünlübayir, Rolf Wernhardt, Dirk Reuter, and Andreas Wieck — Ruhr-Universität Bochum, Lehrstuhl fr Angewandte Festkrperphysik, Universitẗsstrasse 150, D-44780 Bochum

For focused ion beam (FIB) implantation of magnetic ions, liquid metal ion sources (LMIS) with long operation times were developed on the basis of appropriate binary and ternary alloys. Alloys such as AuCrGe, AuDyGe, AuDySi, AuErSi, AuFeGe, AuGdSi, AuGeMn, AuGeNi, AuHoSi, AuSiTb, CoDy, DyNi, and HoNi were used to obtain Cr, Mn, Fe, Co, Ni, Gd, Tb, Dy, Ho and Er ions. The mass spectra were analyzed for the developed sources. As an example, FIB implantation of Mn was investigated. Lines with width about 200 nm were implanted with doses 2 × 10¹¹ − 2 × 10¹⁴ cm⁻² in a GaAs/Al_xGa_1−xAs heterostructures (HEMTs) with two-dimensional electron and two-dimensional hole systems, respectively. Subsequent rapid thermal annealing was performed with typical temperatures of 750^∘C during 30 s. Transport properties through such lines have been investigated as function of magnetic fields up to 5 T in the temperature range from 4.2 to 300 K.