Berlin 2005 – wissenschaftliches Programm

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M: Metallphysik

M 24: Nanoskalige Materialien III

M 24.5: Vortrag

Samstag, 5. März 2005, 15:45–16:00, TU H111

Highly ordered nanoparticle arrays with tunable shape, size and spacing — •Yong Lei, Jörg Weissmüller, and Gerhard Wilde — Institute of Nanotechnology, Research Center Karlsruhe, P.O.Box 3640, D-76021 Karlsruhe, Germany

We report an approach to fabricate highly ordered semiconductor or metal nanoparticle arrays with controllable shape, size and spacing. Nanometer-sized discs, hemispheres, hemi-ellipsoids, and conical morphologies have successfully been obtained. The nanoparticle arrays are fabricated on Si or Si/SiO₂ substrates, using ultra-thin alumina membranes as evaporation masks. The shapes and the sizes of the nanoparticles are adjusted by changing the aspect ratio of the apertures of the nanostructured masks and the amount of material deposited through the nanoporous membranes. The size of the arrayed nanoparticles can be adjusted from 10 to 200 nm. The nanoparticle arrays reported here have been applied in some areas, including field emission and electronic devices. In addition, the nanoparticle arrays are well-suited for investigations concerning size-dependent phenomena due to their extremely narrow size distribution.