Berlin 2005 – scientific programme

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M: Metallphysik

M 30: Symposium Tomographic Methods in Materials Research

M 30.2: Talk

Monday, March 7, 2005, 11:20–11:40, TU H1058

Electron Tomography for Materials Research and Indsutrial Applications — •Christian Kübel — FEI Company, Application Laboratory, Achtseweg Noord 5, 5651 GG Eindhoven, The Netherlands — Fraunhofer Institut für Fertigungstechnik und Materialforschung, Wiener Straße 12, 28359 Bremen, Germany

In recent years, the limitations of ’classical’ electron microscopy in materials science characterization have become increasingly apparent. Especially in areas such as nanotechnology and the IC industry, accurate analysis and measurements for metrology are difficult to obtain as different features overlap in a single 2D projected (S)TEM image. Electron tomographic methods provide a way around these limitations and are capable of delivering nanometer resolution in 3D for relatively ’large’ volumes. BF-TEM tomography techniques, traditionally used in life sciences, are only of limited use in materials science due to diffraction contrast. Therefore, we have developed an automated acquisition for HAADF-STEM tomography, which is easy to use for a wide range of (crystalline) materials. The possibilities of electron tomography for materials science will be demonstrated using catalyst, nanocrystal, and semiconductor materials. Important aspects of the tomography analysis will be determination of particle size distributions, analysis of morphologies and imaging of surface variations in 3D. Finally, the advantages and limitations of both BF-TEM and HAADF-STEM tomography for materials sciences will be discussed.