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M: Metallphysik

M 30: Symposium Tomographic Methods in Materials Research

M 30.5: Vortrag

Montag, 7. März 2005, 12:20–12:40, TU H1058

Nanotomography with Scanning Probe Microscopy — •Robert Magerle — Institut für Physik, Technische Universität Chemnitz

Nanotomography [1] is a novel procedure for high-resolution volume imaging based on scanning probe microscopy (SPM). The method is similar to an excavation on the nanometer scale: With suitable etching of polishing techniques the specimen is eroded step by step and the chemical composition of each freshly exposed surface is imaged with scanning probe microscopy. From the resulting series of images, separated in depth by only a few nanometers, the specimen’s three-dimensional microstructure can be reconstructed. I will present examples of volume images with 10 nm resolution of block copolymers, semi-crystalline polymers, and Ni-based superalloys; limitations and perspectives will also be addressed. With the success of SPM in mind, volume imaging with SPM promises new insights into the physics of materials on the nanometer and even atomic scale. [1] R. Magerle, Phys. Rev. Lett. 85, 2749 (2000); EP 1144989; U.S. Patent 6,546,788.