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O: Oberflächenphysik

O 22: Rastersondentechniken I

O 22.4: Vortrag

Samstag, 5. März 2005, 11:30–11:45, TU EB407

Capacitive force detection in dynamic mode Atomic Force Microscopy — •A.-D. Müller, F. Müller, T.D. Long, and M. Hietschold — Chemnitz University of Technology, Institute of Physics, Solid Surfaces Analysis Group, 09107 Chemnitz

Non-optical methods for the deflection detection of a cantilever beam have many advantages concerning the adjustion and applicability to multi-cantilever applications. The capacitive detection based on a second electrode placed behind the cantilever beam has never achieved to get in use, because its sensitivity was estimated to be too low. This contribution restarts the considerations about the capacitive detection of the cantilever deflection for dynamic mode applications with stiff cantilever beams. Distance dependent curves of the force derivative detected capacitively allow to estimate and compare the method with other detection mechanisms.