Berlin 2005 – wissenschaftliches Programm
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P: Plasmaphysik
P 12: Plasma-Wand Wechselwirkung 1
P 12.1: Vortrag
Samstag, 5. März 2005, 11:00–11:15, HU 3059
Hyper-Thermic Neutral Particles Produced by Surface Neutralisation — •Tatiana Babkina, Timo Gans, and Uwe Czarnetzki — Institut für Plasma- und Atomphysik, Ruhr-Universität Bochum
Hyper-thermic neutrals produced by surface neutralisation of plasma ions appear to have significant potential for various plasma technological applications, e.g. semiconductor processing. Ions produced in an inductively coupled RF discharge are accelerated in the sheath potential in front of a biased electrode. The impinging ions can leave the surface after a certain number of collisions with the lattice of the solid. Directly in front of the surface, neutralisation takes place either by Auger or resonance processes. These fast neutrals traverse the plasma almost collisionless. The presented work is concentrated on investigations of neutralised and reflected hydrogen ions (H+, H2+, H3+). The resulting atomic beam is investigated by optical emission spectroscopy and an energy resolved mass spectrometer opposite to the electrode. The energy spectrum can be explained as a superposition of spectra of H+, H2+, H3+. A contribution of negative ions created at the electrode surface is also observed. The project is funded by the DFG in the frame of the SFB 616.