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P: Plasmaphysik

P 5: Niedertemperaturplasmen / Plasmatechnologie 2

P 5.3: Vortrag

Freitag, 4. März 2005, 15:15–15:30, HU 3038

Intensive excimer emission from nanoseconds pulsed micro hollow cathode discharges — •Byung-Joon Lee, Isfried Petzenhauser, and Klaus Frank — Physics Department 1. University of Erlangen-Nuremberg, Erwin-Rommel Straße 1, 91058 Erlangen

Micro hollow cathode discharges (MHCDs) which have dimensions in the range of 100 µm are high pressure, nonequilibrium discharges. Recently, MHCDs are intensively investigated as a VUV emission source in rare gases. Operating in pulsed mode (pulse duration on the order of 1 to 100 µs), the relative efficiency of the xenon excimer emission reveals an inverse dependence on the pulsed lengths. Therefore in our experiment we reduced pulse width down to nanoseconds ranges in order to increase efficiency of excimer emission in xenon (172 nm). To produce a nanoseconds ranges pulse, a self-matched transmission line pulse generator capable of producing a single high voltage output with minimised reflections regardless of the load impedance is introduced. Changing pulse width (20 ns, 50 ns and 100 ns respectively) and gas pressure, the relative efficiency of the excimer emission in the superimposed(dc+ nanoseconds pulsed) mode and pulsed mode will compared. In addition, the temporal behaviour of the excimer emission from cathode side and anode side will be discussed.