Berlin 2005 – wissenschaftliches Programm

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P: Plasmaphysik

P 7: Poster: Niedertemperaturplasmen / Plasmatechnologie 3, Diagnostik 3

P 7.15: Poster

Freitag, 4. März 2005, 16:30–18:30, Poster HU

Experimental investigations of radio frequency plasma boundary sheath dynamics — •Brian Heil, Deborah O’Connell, Timo Gans, and Uwe Czarnetzki — Institut für Plasma- und Atomphysik, Ruhr-Universität Bochum

A modified GEC reference cell is used to allow for detailed investigations of the dynamics of radio frequency plasma boundary sheaths. The plasma is generated inductively using a planar, 27.12 MHz antenna optimised for efficient inductive power coupling and reduced capacitive coupling. The plasma potential, and thus sheath potential in front of the grounded electrode, can be independently modulated with an additional capacitive ring electrode. The sheath dynamics can be investigated in the frequency range from 20 kHz to 230 MHz. Various diagnostics are employed: Mass resolved, ion energy analysis (Balzers PPM), phase and space resolved electric field measurements using two-photon laser induced fluorescence dip spectroscopy, Langmuir-probe measurements, and phase resolved optical emission spectroscopy (PROES). First experimental results are presented. The project is funded by the DFG in the frame of SFB 591.