Berlin 2005 – wissenschaftliches Programm
Bereiche | Tage | Auswahl | Suche | Downloads | Hilfe
TT: Tiefe Temperaturen
TT 28: Superconductivity - Applications I : Cryodetectors
TT 28.2: Vortrag
Dienstag, 8. März 2005, 14:30–14:45, TU H104
EDS- material analysis with Microcalorimeters — •Christian Hollerith1, Matthias Bühler2, Franz v. Feilitzsch1, Jens Höhne2, Christian Isaila1,3, Michael Huber1, Josef Jochum1, Kevin Phelan2, Birgit Simmnacher3, Rainer Weiland3, and Doreen Wernicke2,1 — 1Physik-Department E15, TU München, James-Franck-Straße, 85747 Garching — 2VeriCold Technologies GmbH, Bahnhofstr. 21, 85757 Ismaning — 3Infineon Technologies AG, Otto-Hahn-Ring 6, 81739 München
Energy dispersive X-ray spectroscopy (EDS) of samples mounted in scanning electron microscopes (SEM) is a standard technique for elemental material analysis. Today Si(Li)-detectors are used in this field with a maximum energy resolution of about 130eV at a X-ray energy of 6keV. This energy resolution is unsatisfactory for the separation of the low energetic lines like M-lines of heavy elements, L-lines of medium heavy elements and K-lines of light elements. But for excitation of small volumes like particles in samples with the electron beam in the SEM only low acceleration voltages may be used and therefore only low energetic lines are excited. A high resolution spectrometer with a microcalorimeter detector cooled by a pulse tube refrigerator with an ADR unit has been installed on a SEM for this purpose. It shows an average energy resolution of better than 10eV @ 1.5keV. The low countrate in comparison to Si(Li) detectors due to the small area of the microcalorimeter has been increased by the application of a polycapillary X-ray optics. This way the microcalorimeter is a promising tool for material analysis of thin layers and small samples.