Augsburg 2006 – wissenschaftliches Programm

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K: Kurzzeitphysik

K 10: Laseranwendungen und Lasermaterialbearbeitung

K 10.3: Vortrag

Donnerstag, 30. März 2006, 12:45–13:00, 1003

3D-microstructuring of Pyrex, quartz glass and WC hard metal using femtosecond laser pulses — •Andy Engel, Udo Löschner, Günter Reiße, and Steffen Weißmantel — University of Applied Sciences Mittweida, Laserinstitut, Technikumplatz 17, 09648 Mittweida

Comprehensive results on three-dimensional fs-laser microstructuring obtained at the laser institute of the University of Applied Sciences Mittweida will be presented. A fs-laser micromachining station FS150-10 from the 3D Micromac AG Chemnitz equipped with a Ti: Sapphire-Laser CPA 2010 from Clark-MXR Inc. Michigan was used for structuring. All experiments were performed with the laser beam focussed on the sample surface using different transmitting objectives and a reflective objective. Based on the investigation of the ablation behaviour in dependence of process parameters, various microstructures consisiting of holes, channels and cavities and showing smooth walls and steep wall angles were produced in those materials. Thereby, either direct ablation or a combination of laser induced modification and subsequent chemical etching was applied. The parameters which were found to be optimum for the microstructuring of each material will be presented. Finally, it will be shown that complex 3D-microstructures can also be produced in those materials.