Dresden 2006 – wissenschaftliches Programm
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AKB: Biologische Physik
AKB 20: Nano-Biomaterials and Devices
AKB 20.10: Vortrag
Donnerstag, 30. März 2006, 12:30–12:45, ZEU 255
Silicon-on-insulator based nanogap structures for bio-molecular electronics — •Sebastian Strobel1, Allan Hansen1, Kenji Arinaga1,2, and Marc Tornow1 — 1Walter Schottky Institut, TU München, 85748 Garching, Germany — 2Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi 243-0197, Japan
The starting point for electrical transport measurements on bio-molecular ”wires” such as DNA oligonucleotides is the preparation of suitable nanogap - electrodes that serve as contact to the molecules. Here, one necessary requirement are biocompatible substrates with sufficient stability in aqueous solutions, such as silicon and silicon oxide.
We pursue a new strategy to prepare nanogap structures of predetermined electrode distance based on silicon-on-insulator substrates. The combination of reactive ion etching and selective wet oxide etching allows for the fabrication of 10-20 nm wide trenches, which act as template for a subsequent metal thin film evaporation step.
We successfully verified the electrical functionality of 20 nm devices by bridging the electrodes with electrically trapped gold nanoparticles. First transport measurements after functionalisation with DNA oligonucleotides will be presented.