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CPP: Chemische Physik und Polymerphysik

CPP 24: POSTER Microfluidics

CPP 24.13: Poster

Donnerstag, 30. März 2006, 17:00–19:00, P2

Thin-film field-effect-transitors for liquid movement detection in microfluidic systems — •Pagra Truman, Petra Uhlmann, and Manfred Stamm — Leibniz-Institut für Polymerforschung Dresden e.V., Hohe Str. 6, 01069 Dresden, Germany

In microfluidic Lab-on-Chip systems and for applications in fundamental research there is a high demand for cost efficient minimal invasive massive parallel highly sensitive liquid movement detection with high spatial resolution. Currently available techniques like optical observation, scattering techniques or scanning techniques do not fulfill all requirements. Therefore we develop a new thin-film Field-Effect-Transistor based detection scheme where single transisitor devices measure flow speed and filling level of capillaries besides being capable to analyze liquid properties like ionic strength. We present electrical transport measurements on large-scale transistor structures based on Silicon-on-Insulator (SOI) technology in aqueous solutions. Planar thin-film Silicon source-drain layers with lateral dimensions of few mm times few centimeters were laterally patterned out of the 55 nm thick top Silicon layer by standard circuit board lithography and wet chemical etching. The devices were electrically connected via metal contacts evaporated on such layers. After integration into a microfluidic cell the latter was utilized to perform the previously described sensing operations.