Dresden 2006 – wissenschaftliches Programm

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DS: Dünne Schichten

DS 13: Internal Symposium “Nanoengineered thin films”

DS 13.2: Hauptvortrag

Mittwoch, 29. März 2006, 14:45–15:30, GER 37

Ion beam assisted growth of chiral sculptured thin films — •Eva Schubert¹, Frank Frost¹, Bodo Fuhrmann², Frank Heyroth², Mathias Schubert³, and Bernd Rauschenbach¹ — ¹Leibniz-Institut für Oberflächenmodifizierung e.V., 04318 Leipzig, Permoserstr. 15 — ²Martin-Luther-Universität Halle-Wittenberg, Interdisziplinäres Zentrum für Materialwissenschaften, Hoher Weg 8, D-06120 Halle(Saale) — ³University of Nebraska-Lincoln, Department of Electrical Engineering, 209 WSEN, Lincoln, NE 68588-0511

The controlled preparation of materials with sizes smaller than 100 nm in at least one dimension is an up to date challenge in modern material science. Their functionality may exceed beyond knowledge and understanding gathered until today. Nanomaterials continue to spark research in science and engineering and are expected to emerge into wide-spread applications. Porous sculptured thin films (STF) consist of three-dimensional nanostructure components and are one example for nanoengineered materials. The films originate from self organization processes during a highly directional growth mode under an extremely oblique particle flux angle of incidence combined with an appropriate substrate rotation. The growth regime allows for the customized fabrication of anisotropic thin films with different chiral morphologies. Novel material properties caused by the nanostructure morphology are discussed and predicted for new materials design.