Dresden 2006 – scientific programme
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DS: Dünne Schichten
DS 20: Ion beam induced nanostructures
DS 20.7: Talk
Thursday, March 30, 2006, 16:00–16:15, GER 37
Self-organized nanoscale multilayer growth during the deposition of hyperthermal species — •Hayo Zutz1, Inga Hannstein1, Carsten Ronning1, Michael Seibt1, Hans Hofsäss1, Wan-Yu Wu2, and Jyh-Ming Ting2 — 12. Physikalisches Institut, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen — 2Department of Materials Science and Engineering, National Cheng Kung University, Tainan, Taiwan, ROC
The quasi-simultaneous deposition of low energy mass selected C+ and either Au+ or Fe+ ions resulted in the formation of alternately metal-rich and metal-deficient layers with periods in the nm range. Transmission electron microscopy reveals that the metal-rich layers consist of rather densely distributed crystalline particles while the metal deficient layers are amorphous or contain only smaller numbers of crystalline clusters. The concentration variation is confirmed by Rutherford backscattering spectroscopy and Auger electron spectroscopy depth profiling. A similar structure was found in films grown by dc-magnetron sputtering of Cu, Pt, and Ni targets in an Ar/CH4 plasma. The processes during mass selected ion beam deposition and magnetron sputtering deposition are far from thermodynamical equilibrium. Therefore, the formation of such periodic concetration variations cannot be attributed to mechanisms like Liesegang pattern formation. The multilayer formation can be decribed by an interplay of sputtering, surface segregation, ion induced diffusion, and the stability of small clusters against ion bombardment.