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DS: Dünne Schichten
DS 22: Thin film deposition and process characterization II
DS 22.2: Talk
Thursday, March 30, 2006, 14:15–14:30, GER 38
Thin Zn-Phthalocyanine films in ITO sputter processes — •Martina Mohr, Klaus Ellmer, and Konstantinos Fostiropoulos — Hahn-Meitner-Institut Berlin, Glienicker Str. 100, D-14109 Berlin
Indium-tin-oxide (ITO) films are widely used as conductive transparent electrodes for optoelectronic devices. However for stability reasons they are usually not sputter grown directly on photoactive organic materials. Here we present a bi-layer system consisting of sputter deposited ITO on vacuum evaporated Zn-Phthalocyanine films. The influence of the sputter process on the organic material and the quality of the ITO layer has been studied by means of optical spectroscopy, XRD and SEM. New ITO structures and morphologies have been discovered. The absorption spectra of the Zn-Phthalocyanine film as well as the conductivity of ITO in these bi-layers are promising for photovoltaic applications.