DS 22: Thin film deposition and process characterization II
Donnerstag, 30. März 2006, 14:00–15:15, GER 38
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14:00 |
DS 22.1 |
Functionalising of Tips for Scanning Probe Microscopy — •Danny Kowerko, Falk Müller, Andi Käppel, Steffen Schulze, and Michael Hietschold
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14:15 |
DS 22.2 |
Thin Zn-Phthalocyanine films in ITO sputter processes — •Martina Mohr, Klaus Ellmer, and Konstantinos Fostiropoulos
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14:30 |
DS 22.3 |
At wavelength inspection of extreme ultraviolet lithography mask blank defects by photoemission electron microscopy — •Jingquan Lin, Andreas Oelsner, Nils Weber, Ulrich Neuhäusler, Jawad Slieh, Armin Brechling, Dimitrii Valdaitsev, Michael Merkel, Gerhard Schönhense, Ulf Kleineberg, and Ulrich Heinzmann
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14:45 |
DS 22.4 |
Hydrogen assisted growth of Fe/V superlattices — •Gregor Nowak, Arndt Remhof, Andreas Liebig, Björgvin Hjörvarsson, and Hartmut Zabel
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15:00 |
DS 22.5 |
Influence of salt ions on the structure of polyelectrolyte multilayers — •Christof Ecker, John E. Wong, Pantea Nazaran, and Regine v. Klitzing
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