Dresden 2006 – scientific programme

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DS: Dünne Schichten

DS 24: Poster presentation

DS 24.32: Poster

Tuesday, March 28, 2006, 15:00–17:30, P2

Application of white beam high energy X-ray diffraction to the analysis of near surface gradients — •Ingwer Denks, Manuela Klaus, and Christoph Genzel — Hahn-Meitner-Institut Berlin (c/o BESSY), Albert-Einstein-Straße 15, D-12489 Berlin

Energy dispersive (ED) diffraction using X-rays up to 100 keV or so is usually applied to the analysis of bulk properties of technical parts such as long range residual stress-, texture- or microstructure gradients. However, the small diffraction angles of some 5 to 10 deg used in high energy diffraction and the high photon flux provided by modern 3rd generation synchrotron radiation sources also allow depth resolved investigations of thin surface layers. So using very narrow slits in the primary and the diffracted beam, rhombohedral volume gauges of large aspect ratio and a small dimension less than 10 microns may be defined. In the contribution a new method is proposed, which is based on a fixed attachment of the slits to the sample system in such a way that the long side of the gauge is always parallel to the sample surface. It will be demonstrated that using such an experimental arrangement, high resolution depth profiling becomes possible even after sample tilt, i. e. for different orientations of the diffraction vector with respect to the sample system.